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Abstract:
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The thesis is a part of the Finnish Academy project FEMAS and TEKES project TOMI-uASSY. Project FEMAS aims to build a simulation environment for manipulation and assembly of micro components to miniaturized products while taking into consideration of those micro domain forces. Project TOMI-uASSY is to develop an environment controlled micro assembly station and to study influence of environmental conditions micro assembly. This thesis concerns the realization of microforce measurement and analysis of the experimental results of microfroces in the micro domain at different humidity and temperature conditions. The microforces include van Waals forces, electrostatic forces, surface tension and etc. This thesis strats with the survey of methods used for microforce measurements, several effects can be used in force measurements which include piezoresistive, piezoelectric, capacitive and AFM based scanning methods. Then general principles about scanning probe microscopies (SPMs) are given and this part especially stresses the atomic force microscopy (AFM) based sensor which has been used in my tests. After the survey, discusses the theory of microforces, which includes the modelling of microforces and force-distance curve theory. Experimental part of the thesis describes the development of a microforce measurement system and implementation of the microforce sensing under different humididty levels. The microforce measurement system consists of a force sensing part and a vision system. The components of the force measurement system include a motor, a piezostack, a strain gauge and a piezolever. This part emphasizes the experimental results of the microforce measurement. The force-distance curve has been measured and compared to the theoretical calculations. The humidity influence on microforces are also dicussed both experimentally and theoretically. /Kir10 |